Title of article
Electron energy loss spectroscopy study of the formation process of Si nanocrystals in SiO2 due to electron stimulated desorption-decomposition
Author/Authors
M. Takeguchi، نويسنده , , K. Furuya ، نويسنده , , K. Yoshihara، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
4
From page
147
To page
150
Keywords
Si , SiO2 , Electron energy lossspectroscopy , Electron stimulated desorption , nanocrystals , Ultrahigh-vacuum field-emission transmission electron microscope
Journal title
Micron
Serial Year
1999
Journal title
Micron
Record number
356775
Link To Document