Title of article :
High-depth-resolution Auger depth profiling/atomic mixing
Author/Authors :
M. Menyhard، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Pages :
11
From page :
255
To page :
265
Keywords :
Ion-induced damage , TRIM simulation , Atomic mixing , Auger depth profiling
Journal title :
Micron
Serial Year :
1999
Journal title :
Micron
Record number :
356787
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=356787
