Title of article :
A ball-indentation method to evaluate the critical stress for dislocation generation in a silicon substrate
Author/Authors :
H. Ohta، نويسنده , , S. Kida and H. Miura، نويسنده , , M. Kitano، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
8
From page :
877
To page :
884
Keywords :
etch-pit , Ion implantation , semiconductor device , silicon. , Dislocation
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Serial Year :
2001
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Record number :
359488
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=359488
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