• Title of article

    Tensile testing of silicon thin films

  • Author/Authors

    T. Tsuchiya، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2005
  • Pages
    10
  • From page
    665
  • To page
    674
  • Keywords
    electrostatic force grip , Polysilicon , single-crystal silicon , Tensile test , tensilestrength.
  • Journal title
    Fatigue and Fracture of Engineering Materials and Structures
  • Serial Year
    2005
  • Journal title
    Fatigue and Fracture of Engineering Materials and Structures
  • Record number

    359868

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=359868