مرکز منطقه ای اطلاع رساني علوم و فناوري

Title of article :

Tensile testing of silicon thin films

Author/Authors :

T. Tsuchiya، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2005

Pages :

From page :

665

To page :

674

Keywords :

electrostatic force grip , Polysilicon , single-crystal silicon , Tensile test , tensilestrength.

Journal title :

Fatigue and Fracture of Engineering Materials and Structures

Serial Year :

2005

Journal title :

Fatigue and Fracture of Engineering Materials and Structures

Record number :

359868

Link To Document :