Title of article :
Mechanical characterization of single crystal silicon and UV-LIGA nickel thin films using tensile tester operated in AFM
Author/Authors :
Y. LEE، نويسنده , , J. TADA، نويسنده , , Y. ISONO، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Keywords :
atomic force microscope (AFM) , elastic–inelastic properties , Tensile test , single crystalsilicon , UV-LIGA nickel film.
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
Journal title :
Fatigue and Fracture of Engineering Materials and Structures
