Title of article
Characterization of structural films using microelectromechanical resonators
Author/Authors
C. L. MUHLSTEIN، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
11
From page
711
To page
721
Keywords
Fatigue , reaction-layer fatigue , Silicon , thin films.
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Serial Year
2005
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Record number
359873
Link To Document