Title of article
Mode I and mixed mode fracture of polysilicon for MEMS
Author/Authors
S. W. Cho، نويسنده , , K. JONNALAGADDA، نويسنده , , I. CHASIOTIS، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
11
From page
21
To page
31
Keywords
AFM , digital image correlation , fracture. Toughness , Crack growth
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Serial Year
2007
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Record number
360005
Link To Document