Title of article
The role of debris-induced cantilever effects in cyclic fatigue of micron-scale silicon films
Author/Authors
O. N. PIERRON، نويسنده , , C. L. MUHLSTEIN، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
7
From page
57
To page
63
Keywords
cantilever effect , Fatigue , MEMS , reaction-layer fatigue , silicon.
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Serial Year
2007
Journal title
Fatigue and Fracture of Engineering Materials and Structures
Record number
360008
Link To Document