Title of article :
Stiction and anti-stiction in MEMS and NEMS
Author/Authors :
Zhao Yapu ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Pages :
10
From page :
1
To page :
10
Keywords :
MEMS , anti-stiction , stiction , work of adhesion , self-assembled monolayer (SAM
Journal title :
Acta Mechanica Sinica
Serial Year :
2003
Journal title :
Acta Mechanica Sinica
Record number :
360363
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=360363
