Title of article
Numerical analysis of theoretical model of the RF MEMS switches
Author/Authors
Zhang Lixian، نويسنده , , Yu Tongxi ، نويسنده , , Zhao Yapu ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
7
From page
178
To page
184
Keywords
RF MEMS , axial stretching , Residual stress , fringing field , critical pull-in voltage
Journal title
Acta Mechanica Sinica
Serial Year
2004
Journal title
Acta Mechanica Sinica
Record number
360447
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