Title of article
Optical tomography for dielectric profiling in processing electronic materials
Author/Authors
L. Zeni، نويسنده , , R. Bernini، نويسنده , , R. Pierri، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
6
From page
137
To page
142
Keywords
Optical tomography , Doping profile , Contactless measurements , Semiconductor material
Journal title
Chemical Engineering Journal
Serial Year
2000
Journal title
Chemical Engineering Journal
Record number
365180
Link To Document