Title of article :
The Atomic Limit of Finite Element Modeling in MEMS: Coupling of Length Scales
Author/Authors :
Robert E. Rudd، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Keywords :
silicon resonator , Finite elements , Molecular dynamics , coupling of length scales , MEMS
Journal title :
Analog Integrated Circuits and Signal Processing
Journal title :
Analog Integrated Circuits and Signal Processing