Title of article :
The Atomic Limit of Finite Element Modeling in MEMS: Coupling of Length Scales
Author/Authors :
Robert E. Rudd، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2001
Pages :
10
From page :
17
To page :
26
Keywords :
silicon resonator , Finite elements , Molecular dynamics , coupling of length scales , MEMS
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2001
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367176
Link To Document :
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