• Title of article

    Neural Network Approach for Linearization of the Electrostatically Actuated Double-Gimballed Micromirror

  • Author/Authors

    Guangya Zhou، نويسنده , , Kelvin K.L. Cheo، نويسنده , , Francis E.H. Tay and Fook Siong Chau ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    13
  • From page
    141
  • To page
    153
  • Keywords
    MEMS , micromirror and macro modeling , Optical MEMS
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Serial Year
    2004
  • Journal title
    Analog Integrated Circuits and Signal Processing
  • Record number

    367431