Title of article
Modeling and Prediction of the Dynamic Behaviour of Microbeams Under Electrostatic Load
Author/Authors
Eugenio Brusa، نويسنده , , Francesco De Bona، نويسنده , , Antonio Gugliotta and Aurelio Somà ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
10
From page
155
To page
164
Keywords
MEMS , microbeams , structural dynamics , Electrostatic actuation , Finite element method
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2004
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367432
Link To Document