Title of article
A New Approach to Abstracting AltPSM Lithography Requirements for IC Design Domains
Author/Authors
Pradiptya Ghosh ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
12
From page
265
To page
276
Keywords
alternating phase shift mask , resolution enhancement technique , Physical design , design rule checking , sub-wavelength process
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2005
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367479
Link To Document