مرکز منطقه ای اطلاع رساني علوم و فناوري - Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry

Title of article :

Mechanical Sensitivity Enhancement of an Area-Changed Capacitive Accelerometer by Optimization of the Device Geometry

Author/Authors :

Badariah Bais and Burhanuddin Yeop Majlis ، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2005

Pages :

From page :

175

To page :

183

Keywords :

MEMS , area-changed , microaccelerometer , Capacitive , sensitivity

Journal title :

Analog Integrated Circuits and Signal Processing

Serial Year :

2005

Journal title :

Analog Integrated Circuits and Signal Processing

Record number :

367545

Link To Document :