Title of article :
Modeling and characterization of three kinds of MEMS resonators fabricated with a thick polysilicon technology
Author/Authors :
D. Paci، نويسنده , , M. Mastrangeli، نويسنده , , A. Nannini and F. Pieri ، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2006
Pages :
7
From page :
41
To page :
47
Keywords :
MEMS resonators . FEM simulations .Temperature stability . Residual stress . Tunable MEMSresonators.
Journal title :
Analog Integrated Circuits and Signal Processing
Serial Year :
2006
Journal title :
Analog Integrated Circuits and Signal Processing
Record number :
367675
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=367675
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