Title of article
Model of electrostatic actuated deformable mirror using strongly coupled electro-mechanical finite element
Author/Authors
Veronique Rochus، نويسنده , , Jean-Claude Golinval، نويسنده , , Christophe Louis، نويسنده , , Carlos Mendez and Igor Klapka ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
7
From page
129
To page
135
Keywords
Electro-mechanical coupling Micro-mirrors Finite element modelling
Journal title
Analog Integrated Circuits and Signal Processing
Serial Year
2007
Journal title
Analog Integrated Circuits and Signal Processing
Record number
367800
Link To Document