مرکز منطقه ای اطلاع رساني علوم و فناوري - Selection of measurement locations for the control of rapid thermal processor

Title of article :

Selection of measurement locations for the control of rapid thermal processor

Author/Authors :

Chi-Jay [Reference to Huang]، نويسنده , , Cheng-Ching [Reference to Yu]، نويسنده , , Shih-Haur [Reference to Shen]، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2000

Pages :

From page :

705

To page :

715

Keywords :

measurement selection , Temperature control , Temperature uniformity , RTP

Journal title :

Automatica

Serial Year :

2000

Journal title :

Automatica

Record number :

368969

Link To Document :