Title of article
Implicit linear control law of a close-spaced vapor transport process
Author/Authors
M. Bonilla Estrada، نويسنده , , V. Rejon and R. Castro-Rodriguez، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2000
Pages
11
From page
569
To page
579
Keywords
Thin "lms semiconductors , Temperature process , Implicit systems , CSVT , PI controllers , Modeling and control of semiconductor process RTP
Journal title
Electric Power Systems Research
Serial Year
2000
Journal title
Electric Power Systems Research
Record number
372716
Link To Document