Title of article :
Run-to-run control and performance monitoring of overlay in semiconductor manufacturing
Author/Authors :
C. A. Bode، نويسنده , , B. S. Ko and T. F. Edgar، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2004
Keywords :
Microelectronics manufacturing , lithography , Model predictive control , Controller performance monitoring , Overlay
Journal title :
Electric Power Systems Research
Journal title :
Electric Power Systems Research
