Title of article
LPV control for a wafer stage: beyond the theoretical solution
Author/Authors
Matthijs Groot Wassink، نويسنده , , Marc van de Wal، نويسنده , , Carsten Scherer and Okko Bosgra، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
15
From page
231
To page
245
Keywords
LPV synthesis , Servo systems , Motion control , mechatronics , Position-dependent dynamics , Gain scheduling , LPV modeling , feedback control
Journal title
Electric Power Systems Research
Serial Year
2005
Journal title
Electric Power Systems Research
Record number
373342
Link To Document