Title of article
Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry
Author/Authors
Hsien-Chi Yeh، نويسنده , , Wei-Tou Ni and Sheau-shi Pan، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
8
From page
559
To page
566
Keywords
Digital control , feedback control , positioning system , Measuring elements , Mechanism , Crosstalk interference
Journal title
Electric Power Systems Research
Serial Year
2005
Journal title
Electric Power Systems Research
Record number
373369
Link To Document