Title of article :
Digital closed-loop nanopositioning using rectilinear flexure stage and laser interferometry
Author/Authors :
Hsien-Chi Yeh، نويسنده , , Wei-Tou Ni and Sheau-shi Pan، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Keywords :
Digital control , feedback control , positioning system , Measuring elements , Mechanism , Crosstalk interference
Journal title :
Electric Power Systems Research
Journal title :
Electric Power Systems Research
