Title of article
Surface analysis of Si/W multilayer using total reflection X-ray photoelectron spectroscopy
Author/Authors
Jun Kawai، نويسنده , , Kouichi Hayashi، نويسنده , , Hiroyuki Amano، نويسنده , , Hisataka Takenaka and Yoshinori Kitajima، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
5
From page
787
To page
791
Keywords
Grazing incidence X-rays , X-ray multilayer optics , Surface analysis , Total reflection X-rays
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
1998
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
378990
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