مرکز منطقه ای اطلاع رساني علوم و فناوري - Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Title of article :

Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV

Author/Authors :

Masaki Yamamoto، نويسنده , , Hiroshi Nomura، نويسنده , , Mihiro Yanagihara، نويسنده , , Minaji Furudate and Makoto Watanabe، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 1999

Pages :

From page :

869

To page :

873

Keywords :

EUV transmission multilayers , polarization , Ellipsometry , synchrotron

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Serial Year :

1999

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Record number :

379373

Link To Document :