Title of article
Polarization performance of EUV transmission multilayers as λ/4 and λ/2 plates at a photon energy of 97 eV
Author/Authors
Masaki Yamamoto، نويسنده , , Hiroshi Nomura، نويسنده , , Mihiro Yanagihara، نويسنده , , Minaji Furudate and Makoto Watanabe، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
5
From page
869
To page
873
Keywords
EUV transmission multilayers , polarization , Ellipsometry , synchrotron
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
1999
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
379373
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