مرکز منطقه ای اطلاع رساني علوم و فناوري - LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Title of article :

LEEIXS and XPS studies of reactive unbalanced magnetron sputtered chromium oxynitride thin films with air

Author/Authors :

Saïd Agouram، نويسنده , , Franz Bodart and Guy Terwagne، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2004

Pages :

From page :

173

To page :

181

Keywords :

Chromium oxynitride , LEEIXS , XPS

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Serial Year :

2004

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Record number :

379948

Link To Document :