Title of article :
EUV beam splitter for use in the wavelength region around 6 nm
Author/Authors :
Hisataka Takenaka، نويسنده , , Satoshi Ichimaru and E.M. Gullikson، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
3
From page :
1043
To page :
1045
Keywords :
EUV , Multilayer , Beam splitter , Free-standing
Journal title :
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year :
2005
Journal title :
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number :
380464
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=380464
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