مرکز منطقه ای اطلاع رساني علوم و فناوري - Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source

Title of article :

Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source

Author/Authors :

Tetsuo Harada and Tadashi Hatano، نويسنده ,

Issue Information :

روزنامه با شماره پیاپی سال 2005

Pages :

From page :

1075

To page :

1077

Keywords :

Imaging plate , EUV , Thin film filter , Laser produced plasma

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Serial Year :

2005

Journal title :

JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA

Record number :

380472

Link To Document :