Title of article
Thin film filters for an EUV multilayer mirror optics with a laser produced plasma light source
Author/Authors
Tetsuo Harada and Tadashi Hatano، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
3
From page
1075
To page
1077
Keywords
Imaging plate , EUV , Thin film filter , Laser produced plasma
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year
2005
Journal title
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number
380472
Link To Document