Title of article :
Accurate measurement of EUV multilayer period thicknesses by in situ automatic ellipsometry
Author/Authors :
T. Tsuru، نويسنده , , T. Tsutou، نويسنده , , T. Hatano and M. Yamamoto، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
3
From page :
1083
To page :
1085
Keywords :
Rate monitoring , EUV multilayer , Ellipsometry , Layer-by-layer analysis
Journal title :
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Serial Year :
2005
Journal title :
JOURNAL OF ELECTRON SPECTROSCOPY & RELATED PHENOMENA
Record number :
380474
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=380474
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