Title of article
A 2-MHz 2-kW voltage-source inverter for low-temperature plasma generators: implementation of fast switching with a third-order resonant circuit
Author/Authors
Fujita، نويسنده , , H.، نويسنده , , Akagi، نويسنده , , H.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
7
From page
21
To page
27
Keywords
High-frequency inverter , low-temperatureplasma , output capacitance , power MOSFET.
Journal title
IEEE Transactions on Industry Applications
Serial Year
1999
Journal title
IEEE Transactions on Industry Applications
Record number
380753
Link To Document