Title of article :
Space- and surface-charge behavior analysis of plasma-preprocessed dielectric thin films
Author/Authors :
Takashima، نويسنده , , K.، نويسنده , , Oda، نويسنده , , T.، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 1999
Keywords :
Laser-induced pressure pulse method , lowpressuredischarge plasma , Space charge , Surface modification , thermally stimulated discharge current measurement , X-rayphotoelectron spectroscopy.
Journal title :
IEEE Transactions on Industry Applications
Journal title :
IEEE Transactions on Industry Applications
