Title of article
Space- and surface-charge behavior analysis of plasma-preprocessed dielectric thin films
Author/Authors
Takashima، نويسنده , , K.، نويسنده , , Oda، نويسنده , , T.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
6
From page
1192
To page
1197
Keywords
Laser-induced pressure pulse method , lowpressuredischarge plasma , Space charge , Surface modification , thermally stimulated discharge current measurement , X-rayphotoelectron spectroscopy.
Journal title
IEEE Transactions on Industry Applications
Serial Year
1999
Journal title
IEEE Transactions on Industry Applications
Record number
380887
Link To Document