Title of article :
CF Decomposition Using Inductively Coupled Plasma: Effect of Power Frequency
Author/Authors :
Tomoyuki Kuroki، نويسنده , , Junko Mine، نويسنده , , and Masaaki Okubo، نويسنده , , Toshiaki Yamamoto، نويسنده , , and Noboru Saeki، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Pages :
6
From page :
215
To page :
220
Keywords :
CF4 , Inductively Coupled Plasma(ICP) , perfluorocompounds (PFCs) , power frequency. , Decomposition
Journal title :
IEEE Transactions on Industry Applications
Serial Year :
2005
Journal title :
IEEE Transactions on Industry Applications
Record number :
381698
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=381698
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