Title of article
Advances in Precise Positioning Using the Electrostatic Glass Motor
Author/Authors
Roland Moser، نويسنده , , Laurent Sache، نويسنده , , Alain Cassat، نويسنده , , Toshiro Higuchi، نويسنده , , and Hannes Bleuler، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2005
Pages
6
From page
972
To page
977
Keywords
Electrostatic induction , linear nanometric positioning , Electrostatic glass motors , rotary sub-arc-second positioning.
Journal title
IEEE Transactions on Industry Applications
Serial Year
2005
Journal title
IEEE Transactions on Industry Applications
Record number
381764
Link To Document