• Title of article

    Shape-based optimal estimation and design of curve evolution processes with application to plasma etching

  • Author/Authors

    Berg، نويسنده , , J.M.، نويسنده , , Zhou، نويسنده , , N.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    12
  • From page
    1862
  • To page
    1873
  • Keywords
    parameter estimation , Level set methods , semiconductormanufacturing , sensitivity equations.
  • Journal title
    IEEE Transactions on Automatic Control
  • Serial Year
    2001
  • Journal title
    IEEE Transactions on Automatic Control
  • Record number

    386083

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=386083