Title of article
Describing Hydrodynamic Particle Removal from Surfaces Using the Particle Reynolds Number
Author/Authors
G.M. Burdick، نويسنده , , N.S. Berman ، نويسنده , , S.P. Beaudoin ، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2001
Pages
13
From page
453
To page
465
Keywords
chemical–mechanical planarization (CMP) , particle Reynolds number , hydrodynamic detachment , van der Waals forces , post-CMP cleaning , particle adhesion
Journal title
Journal of Nanoparticle Research
Serial Year
2001
Journal title
Journal of Nanoparticle Research
Record number
390052
Link To Document