• Title of article

    Low dielectric constant polymers for microelectronics

  • Author/Authors

    G. Maier ، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2001
  • Pages
    63
  • From page
    3
  • To page
    65
  • Keywords
    dielectric constant , Interlayer dielectric , Intermetal dielectric , Low-e-dielectrics , Low-e polymer , Low-k polymer , Polymers for microelectronics
  • Journal title
    Progress in Polymer Science
  • Serial Year
    2001
  • Journal title
    Progress in Polymer Science
  • Record number

    390746

    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=390746