• Title of article

    Synthesis of fault-tolerant supervisor for automated manufacturing systems: a case study on photolithographic process

  • Author/Authors

    Kwang-Hyun Cho، نويسنده , , Jong-Tae Lim، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 1998
  • Pages
    4
  • From page
    348
  • To page
    351
  • Keywords
    Fault-tolerance , supervisor. , photolithographicprocess , Discrete event dynamic systems
  • Journal title
    I E E E Transactions on Robotics and Automation
  • Serial Year
    1998
  • Journal title
    I E E E Transactions on Robotics and Automation
  • Record number

    391262