Timed Petri nets in modeling and analysis of cluster tools

Zuberek، نويسنده , , W.M.، نويسنده ,

دوماهنامه با شماره پیاپی سال 2001

14

562

575

Performanceanalysis , Cluster tools , place invariants , structuralanalysis , transient behavior. , Timed Petri nets , net transformations , steady-state behavior

I E E E Transactions on Robotics and Automation

2001

I E E E Transactions on Robotics and Automation

391591