Title of article
Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons
Author/Authors
MuDer Jeng، نويسنده , , Xiaolan Xie، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2001
Pages
13
From page
576
To page
588
Keywords
Deadlock analysis , degraded behavior , Petri nets , siphons. , semiconductor manufacturing
Journal title
I E E E Transactions on Robotics and Automation
Serial Year
2001
Journal title
I E E E Transactions on Robotics and Automation
Record number
391592
Link To Document