Title of article :
Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons
Author/Authors :
MuDer Jeng، نويسنده , , Xiaolan Xie، نويسنده ,
Issue Information :
دوماهنامه با شماره پیاپی سال 2001
Keywords :
Deadlock analysis , degraded behavior , Petri nets , siphons. , semiconductor manufacturing
Journal title :
I E E E Transactions on Robotics and Automation
Journal title :
I E E E Transactions on Robotics and Automation
