• Title of article

    Modeling and analysis of semiconductor manufacturing systems with degraded behavior using Petri nets and siphons

  • Author/Authors

    MuDer Jeng، نويسنده , , Xiaolan Xie، نويسنده ,

  • Issue Information
    دوماهنامه با شماره پیاپی سال 2001
  • Pages
    13
  • From page
    576
  • To page
    588
  • Keywords
    Deadlock analysis , degraded behavior , Petri nets , siphons. , semiconductor manufacturing
  • Journal title
    I E E E Transactions on Robotics and Automation
  • Serial Year
    2001
  • Journal title
    I E E E Transactions on Robotics and Automation
  • Record number

    391592