Title of article
Indirect adaptive control of reactive ion etching using neural networks
Author/Authors
Stokes، نويسنده , , D.، نويسنده , , May، نويسنده , , G.S.، نويسنده ,
Issue Information
دوماهنامه با شماره پیاپی سال 2001
Pages
8
From page
650
To page
657
Keywords
Reactive ion etching , NEURAL NETWORKS , real-time control.
Journal title
I E E E Transactions on Robotics and Automation
Serial Year
2001
Journal title
I E E E Transactions on Robotics and Automation
Record number
391598
Link To Document