Title of article
A Multiresolution Analysis-Assisted Reinforcement Learning Approach to Run-by-Run Control
Author/Authors
R. Ganesan، نويسنده , , R. Ragupathi and T. K. Das، نويسنده , , and K. M. Ramachandran، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
12
From page
182
To page
193
Keywords
Chemical mechanical planarization (CMP) , exponentiallyweighted moving average (EWMA) , Multiresolution , Reinforcementlearning , run-by-run control , wavelet , wavelet-modulatedreinforcement learning–run-by run (WRL–RbR).
Journal title
I E E E Transactions on Automation Science and Engineering
Serial Year
2007
Journal title
I E E E Transactions on Automation Science and Engineering
Record number
391865
Link To Document