Title of article :
A Multiresolution Analysis-Assisted Reinforcement Learning Approach to Run-by-Run Control
Author/Authors :
R. Ganesan، نويسنده , , R. Ragupathi and T. K. Das، نويسنده , , and K. M. Ramachandran، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
Chemical mechanical planarization (CMP) , exponentiallyweighted moving average (EWMA) , Multiresolution , Reinforcementlearning , run-by-run control , wavelet , wavelet-modulatedreinforcement learning–run-by run (WRL–RbR).
Journal title :
I E E E Transactions on Automation Science and Engineering
Journal title :
I E E E Transactions on Automation Science and Engineering
