Title of article
Application of neural fuzzy network to pyrometer correction and temperature control in rapid thermal processing
Author/Authors
Jiun-Hong Lai، نويسنده , , Chin-Teng Lin، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1999
Pages
16
From page
160
To page
175
Keywords
emissivity , feedforward learning , inverse control , TSK fuzzy rules , wafer. , temperature measurement
Journal title
IEEE TRANSACTIONS ON FUZZY SYSTEMS
Serial Year
1999
Journal title
IEEE TRANSACTIONS ON FUZZY SYSTEMS
Record number
395052
Link To Document