• Title of article

    Explaining strain [in silicon]

  • Author/Authors

    Keyes، نويسنده , , R.W.، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2002
  • Pages
    4
  • From page
    36
  • To page
    39
  • Abstract
    Large effects of elastic strain on the electrical resistance of silicon were discovered not long after the recognition of silicon as the material for the development of solid-state electronics. The effects were shortly employed as the basis of a variety of mechanical sensors. More recently, the use of strain to improve the performance of field-effect transistors (FETs) has drawn increased attention to its role as a part of the arsenal of silicon electronic technology. Attention to unwanted strain as a source of problems is also increasing. This article is aimed at explaining the basis of the effects of strain on the electrical properties of n-silicon and how these effects produce both good and bad results.
  • Journal title
    IEEE Circuits and Devices Magazine
  • Serial Year
    2002
  • Journal title
    IEEE Circuits and Devices Magazine
  • Record number

    397503