Title of article
Explaining strain [in silicon]
Author/Authors
Keyes، نويسنده , , R.W.، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2002
Pages
4
From page
36
To page
39
Abstract
Large effects of elastic strain on the electrical resistance of silicon were discovered not long after the recognition of silicon as the material for the development of solid-state electronics. The effects were shortly employed as the basis of a variety of mechanical sensors. More recently, the use of strain to improve the performance of field-effect transistors (FETs) has drawn increased attention to its role as a part of the arsenal of silicon electronic technology. Attention to unwanted strain as a source of problems is also increasing. This article is aimed at explaining the basis of the effects of strain on the electrical properties of n-silicon and how these effects produce both good and bad results.
Journal title
IEEE Circuits and Devices Magazine
Serial Year
2002
Journal title
IEEE Circuits and Devices Magazine
Record number
397503
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