Author/Authors :
Hutchins، نويسنده , , J.B.; Martin، نويسنده , , M.D.; Belolipetskiy، نويسنده , , S.; Cox، نويسنده , , H.L.، نويسنده , , Jr.; Pitts، نويسنده , , W.K.; Walsh، نويسنده , , K.M.، نويسنده ,
Abstract :
A conventional laboratory room was converted into
a cleanroom for laser microfabrication. These simple techniques
resulted in a measured class 100 environment at the surface
of the optical table, well beyond the class 1000 design goal.
The total conversion costs were approximately 40% the cost
of a comparable commercial modular cleanroom, sufficiently
inexpensive for the devlopment of microfabrication instructional
laboratories.
