An unconditionally stable three level finite difference scheme for solving parabolic two-step micro heat transport equations in a three-dimensional double-layered thin film

Heat transport at the microscale is of vital importance in microtechnology applications. The heat transport equations are parabolic two-step equations, which are different from the traditional heat diffusion equation. In this study, we develop a three-level finite difference scheme for solving the micro heat transport equations in a three-dimensional double-layered thin film. It is shown by the discrete energy method that the scheme is unconditionally stable. Numerical results for thermal analysis of a gold layer on a chromium padding layer are obtained