Correction of Edge Effect in AC Calorimetric Method for Measuring Thermal Diffusivity of CVD Diamond Films1

In the thermal diffusivity measurement of a CVD diamond film using an ac calorimetric method, the reflection of an ac temperature wave at the edge of the film sample should be considered due to the limited length of the sample and its high thermal diffusivity, i.e., the edge effect. In this case, the measured ther- mal diffusivity is given as a function of frequency. The relation between the measured thermal diffusivity and the frequency is represeInted as an analytical expression. The real thermal diffusivity is obtained by correcting the edge effect by two means. One is an iterative method using the directly measured edge length of the sample to fit the analytical expression. The other is a parameter estimation method by which a simplex method is used to estimate the edge length and the real thermal diffusivity. Thermal diffusivities of two diamond films were measured, and data were analyzed using the above methods. The result shows that the parameter estimation method is relatively accurate and convenient in processing test data.