Thermal and Electrical Properties of a Suspended Nanoscale Thin Film

This paper reports on measurements of in-plane thermal conductivities, electrical conductivities, and Lorentz number of two microfabricated, suspended, nanosized thin films with a thickness of 28 nm. The effect of the film thickness on the in-plane thermal conductivity is examined by measuring other nanofilm samples with a thickness of 40 nm. The experimental results show that the electrical conductivity, resistance–temperature coefficient, and in-plane thermal conductivity of the nanofilms are much smaller than the corresponding bulk values from 77 to 330 K. However, the Lorentz number of the nanofilms is about two times that of the bulk value at room temperature, and even up to three times that of the bulk value at 77 K. These results indicate that the relation between the thermal conductivity and electrical conductivity of the nanofilms does not follow the Wiedemann–Franz law for bulk metallic materials.