SIMULTANEOUS DETERMINATION OF FOUR OPTICAL PARAMETERS FROM ELLIPSOMETRIC DATA: A NEW METHOD

This paper shows that the four optical parameters [n(metal), k(metal), n(film), and thickness of film] of any metal, semiconductor, or dielectric material covered by a transparent thin Film can be determined from ellipsometric data taken at two or more angles of incidence. The method is convenient, non-destructive, and accurate. As an example, an aluminum mirror with a silicon oxide protective coating was characterized. Results are analyzed and probable accuracy determined. The overall range and accuracy to he expected of the method are presented and discussed.