Performance characteristics of a pressure microsensor

A new fiber optic microsensor has been developed for pressure measurement. The pressure microsensor is extremely small (360 μm). Performance characteristics of the microsensor were evaluated over a pressure range from 0 to 250 mm Hg. Five sensors were compared to a National Institute of Standards and Technology traceable reference pressure. The microsensor had an accuracy, repeatability, and linearity better than 2% full-scale output (FSO) and a hysteresis of 4.5% FSO.