A fast automatic RBS/w channeling system for damage depth profiling

A computer-aided data acquisition coupling with goniometer-control system dedicated for damage depth profile measurements is established. The channeling direction searching is performed along tilt and azimuth directions. The system includes a computer code to convert the measured spectra into damage depth profile. The analyzing time for each sample requires approximately 20–30 min. The damage depth profiles of the self-implanted (1 0 0) silicon samples are in reasonable agreement with the calculated results yielded by the SRIM Monte-Carlo simulation code.